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Tomoyoshi Ichimaru
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Kudamatsu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing method
Patent number
8,580,689
Issue date
Nov 12, 2013
Hitachi High-Technologies Corporation
Tomoyoshi Ichimaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
8,143,175
Issue date
Mar 27, 2012
Hitachi High-Technologies Corporation
Satoshi Une
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
7,989,330
Issue date
Aug 2, 2011
Hitachi High-Technologies Corporation
Takeshi Shima
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DRY ETCHING METHOD
Publication number
20130015158
Publication date
Jan 17, 2013
Tomoyoshi Ichimaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY ETCHING METHOD
Publication number
20100285669
Publication date
Nov 11, 2010
Takeshi SHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY ETCHING METHOD
Publication number
20090280651
Publication date
Nov 12, 2009
Satoshi Une
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dry etching method
Publication number
20070218696
Publication date
Sep 20, 2007
Kenichi Kuwabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dry etching method
Publication number
20070207618
Publication date
Sep 6, 2007
Satoshi Une
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing method
Publication number
20050189320
Publication date
Sep 1, 2005
Tomoyoshi Ichimaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20040173311
Publication date
Sep 9, 2004
Tomoyoshi Ichimaru
H01 - BASIC ELECTRIC ELEMENTS