Tomoyoshi Ichimaru

Person

  • Kudamatsu-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method

    • Patent number 8,580,689
    • Issue date Nov 12, 2013
    • Hitachi High-Technologies Corporation
    • Tomoyoshi Ichimaru
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method

    • Patent number 8,143,175
    • Issue date Mar 27, 2012
    • Hitachi High-Technologies Corporation
    • Satoshi Une
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method

    • Patent number 7,989,330
    • Issue date Aug 2, 2011
    • Hitachi High-Technologies Corporation
    • Takeshi Shima
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    DRY ETCHING METHOD

    • Publication number 20130015158
    • Publication date Jan 17, 2013
    • Tomoyoshi Ichimaru
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DRY ETCHING METHOD

    • Publication number 20100285669
    • Publication date Nov 11, 2010
    • Takeshi SHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DRY ETCHING METHOD

    • Publication number 20090280651
    • Publication date Nov 12, 2009
    • Satoshi Une
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dry etching method

    • Publication number 20070218696
    • Publication date Sep 20, 2007
    • Kenichi Kuwabara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dry etching method

    • Publication number 20070207618
    • Publication date Sep 6, 2007
    • Satoshi Une
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing method

    • Publication number 20050189320
    • Publication date Sep 1, 2005
    • Tomoyoshi Ichimaru
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus and method

    • Publication number 20040173311
    • Publication date Sep 9, 2004
    • Tomoyoshi Ichimaru
    • H01 - BASIC ELECTRIC ELEMENTS