Tomoyuki Akashi

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor thin film forming system
- Patent number 7,312,418
- Issue date Dec 25, 2007
- NEC Corporation
- Hiroshi Tanabe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
S system for the formation of a silicon thin film and a semiconduct...
- Patent number 6,861,614
- Issue date Mar 1, 2005
- NEC Corporation
- Hiroshi Tanabe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for producing a semiconductor thin film
- Patent number 6,680,460
- Issue date Jan 20, 2004
- NEC Corporation
- Hiromichi Takaoka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR THIN FILM FORMING SYSTEM
- Publication number 20070166945
- Publication date Jul 19, 2007
- Hiroshi Tanabe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Semiconductor thin film forming system
- Publication number 20050109743
- Publication date May 26, 2005
- Hiroshi Tanabe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR