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Tomoyuki Azuma
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Arakawa-ku, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
8,765,002
Issue date
Jul 1, 2014
Mitsubishi Gas Chemical Company, Inc.
Tomoyuki Azuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning and process for producing semiconductor device
Patent number
7,767,585
Issue date
Aug 3, 2010
Sony Corporation
Koichiro Saga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for producing structural body and etchant for silicon oxide...
Patent number
7,670,496
Issue date
Mar 2, 2010
Sony Corporation
Koichiro Saga
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METAL-BINDING PEPTIDE AND USE THEREOF
Publication number
20210085807
Publication date
Mar 25, 2021
THE UNIVERSITY OF TOKYO
Yuji Teramura
C07 - ORGANIC CHEMISTRY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20140283992
Publication date
Sep 25, 2014
Tomoyuki AZUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20120223054
Publication date
Sep 6, 2012
Tomoyuki AZUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CLEANING AND PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE
Publication number
20090221143
Publication date
Sep 3, 2009
Koichiro Saga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET ETCHING METHOD AND WET ETCHING APPARATUS
Publication number
20090114619
Publication date
May 7, 2009
MITSUBISHI GAS CHEMICAL COMPANY INC.
Ryuji Sotoaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Cleaning Device and Cleaning Method Thereof
Publication number
20080047577
Publication date
Feb 28, 2008
Hideto Goto
B08 - CLEANING
Information
Patent Application
Anisotropic etching agent composition used for manufacturing of mic...
Publication number
20070175862
Publication date
Aug 2, 2007
Kenji Yamada
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process for producing structural body and etchant for silicon oxide...
Publication number
20050205515
Publication date
Sep 22, 2005
Koichiro Saga
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Cleaning method
Publication number
20040221875
Publication date
Nov 11, 2004
Koichiro Saga
B08 - CLEANING