Tomoyuki Horiuchi

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Shizuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing method and charged particle beam writ...
- Patent number 8,614,428
- Issue date Dec 24, 2013
- Nuflare Technology, Inc.
- Tomoyuki Horiuchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Writing data processing control apparatus, writing method, and writ...
- Patent number 7,844,857
- Issue date Nov 30, 2010
- Nuflare Technology, Inc.
- Yusuke Sakai
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam shot position correction coefficient computation/updating tech...
- Patent number 7,705,327
- Issue date Apr 27, 2010
- Nuflare Technology, Inc.
- Tomoyuki Horiuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern writing apparatus using charged particle beam, and program-...
- Patent number 7,605,383
- Issue date Oct 20, 2009
- Nuflare Technology, Inc.
- Tomoyuki Horiuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam pattern writing method and apparatus and soft...
- Patent number 7,589,335
- Issue date Sep 15, 2009
- Nuflare Technology, Inc.
- Takuya Matsukawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
- Publication number 20100207017
- Publication date Aug 19, 2010
- NuFlare Technology, Inc.
- Tomoyuki Horiuchi
- B82 - NANO-TECHNOLOGY
Information Patent Application
WRITING DATA PROCESSING CONTROL APPARATUS, WRITING METHOD, AND WRIT...
- Publication number 20080235535
- Publication date Sep 25, 2008
- NuFlare Technology, Inc.
- Yusuke SAKAI
- B82 - NANO-TECHNOLOGY
Information Patent Application
BEAM SHOT POSITION CORRECTION COEFFICIENT COMPUTATION/UPDATING TECH...
- Publication number 20080078947
- Publication date Apr 3, 2008
- NuFlare Technology, Inc.
- Tomoyuki HORIUCHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN WRITING APPARATUS USING CHARGED PARTICLE BEAM, AND PROGRAM-...
- Publication number 20080067431
- Publication date Mar 20, 2008
- NuFlare Technology, Inc.
- Tomoyuki Horiuchi
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS AND SOFT...
- Publication number 20080011965
- Publication date Jan 17, 2008
- NuFlare Technology, Inc.
- Takuya Matsukawa
- B82 - NANO-TECHNOLOGY