Tomoyuki Kawano

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Yamaguchi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum process apparatus and method of operating the same
- Patent number 6,917,844
- Issue date Jul 12, 2005
- Hitachi, Ltd.
- Tomoyuki Kawano
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Vacuum process apparatus and method of operating the same
- Patent number 6,745,093
- Issue date Jun 1, 2004
- Hitachi, Ltd.
- Tomoyuki Kawano
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Vacuum process apparatus and method of operating the same
- Publication number 20040225393
- Publication date Nov 11, 2004
- Tomoyuki Kawano
- G05 - CONTROLLING REGULATING