Tomoyuki Nara

Person

  • Shibukawa City, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 10,128,089
    • Issue date Nov 13, 2018
    • Tokyo Electron Limited
    • Yoshiyuki Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Focus ring and manufacturing method therefor

    • Patent number 9,196,512
    • Issue date Nov 24, 2015
    • Tokyo Electron Limited
    • Yoshiyuki Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Co-extruded multilayer laminate

    • Patent number 5,709,956
    • Issue date Jan 20, 1998
    • Denki Kagaku Kogyo Kabushiki Kaisha
    • Ryoichi Yamabe
    • B32 - LAYERED PRODUCTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20160035543
    • Publication date Feb 4, 2016
    • TOKYO ELECTRON LIMITED
    • Yoshiyuki Kobayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FOCUS RING AND MANUFACTURING METHOD THEREFOR

    • Publication number 20110315318
    • Publication date Dec 29, 2011
    • TOKYO ELECTRON LIMITED
    • Yoshiyuki Kobayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...