Tomoyuki OBU

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming laminated film and forming apparatus thereof
- Patent number 9,425,040
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Tomoyuki Obu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of forming carbon film
- Patent number 9,378,944
- Issue date Jun 28, 2016
- Tokyo Electron Limited
- Tomoyuki Obu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stacked semiconductor device, and method and apparatus of manufactu...
- Patent number 9,343,292
- Issue date May 17, 2016
- Tokyo Electron Limited
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming silicon film
- Patent number 9,293,323
- Issue date Mar 22, 2016
- Tokyo Electron Limited
- Tomoyuki Obu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming seed layer, method of forming silicon film, and f...
- Patent number 9,263,256
- Issue date Feb 16, 2016
- Tokyo Electron Limited
- Tomoyuki Obu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon oxide film forming method and apparatus
- Patent number 9,006,115
- Issue date Apr 14, 2015
- Tokyo Electron Limited
- Tomoyuki Obu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SILICON OXIDE FILM FORMING METHOD AND SILICON OXIDE FILM FORMING AP...
- Publication number 20140295675
- Publication date Oct 2, 2014
- TOKYO ELECTRONIC LIMITED
- Toshiyuki IKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STACKED SEMICONDUCTOR DEVICE, AND METHOD AND APPARATUS OF MANUFACTU...
- Publication number 20140284808
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT MEMBER AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20140251209
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Tomoyuki OBU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SILICON FILM AND FILM FORMING APPARATUS
- Publication number 20140187025
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Tomoyuki OBU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SEED LAYER, METHOD OF FORMING SILICON FILM, AND F...
- Publication number 20140187024
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Tomoyuki OBU
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF FORMING LAMINATED FILM AND FORMING APPARATUS THEREOF
- Publication number 20140080315
- Publication date Mar 20, 2014
- TOKYO ELECTRON LIMITED
- Tomoyuki OBU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS OF FORMING CARBON FILM
- Publication number 20140011368
- Publication date Jan 9, 2014
- Tomoyuki OBU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON OXIDE FILM FORMING METHOD AND APPARATUS
- Publication number 20140011371
- Publication date Jan 9, 2014
- TOKYO ELECTRON LIMITED
- Tomoyuki OBU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON OXIDE FILM FORMING METHOD AND APPARATUS
- Publication number 20140004715
- Publication date Jan 2, 2014
- Tomoyuki OBU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tomoyuki OBU

Person

Patents Grantslast 30 patents

Method of forming laminated film and forming apparatus thereof

Method and apparatus of forming carbon film

Stacked semiconductor device, and method and apparatus of manufactu...

Method of forming silicon film

Method of forming seed layer, method of forming silicon film, and f...

Silicon oxide film forming method and apparatus

Patents Applicationslast 30 patents

SILICON OXIDE FILM FORMING METHOD AND SILICON OXIDE FILM FORMING AP...

STACKED SEMICONDUCTOR DEVICE, AND METHOD AND APPARATUS OF MANUFACTU...

SUPPORT MEMBER AND SEMICONDUCTOR MANUFACTURING APPARATUS

METHOD OF FORMING SILICON FILM AND FILM FORMING APPARATUS

METHOD OF FORMING SEED LAYER, METHOD OF FORMING SILICON FILM, AND F...

METHOD OF FORMING LAMINATED FILM AND FORMING APPARATUS THEREOF

METHOD AND APPARATUS OF FORMING CARBON FILM

SILICON OXIDE FILM FORMING METHOD AND APPARATUS

SILICON OXIDE FILM FORMING METHOD AND APPARATUS