TREA

Tomoyuki Ohbu

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  • Nirasaki, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Heat treatment process for wafers
    • Patent number 5,500,388
    • Issue date Mar 19, 1996
    • Tokyo Electron Kabushiki Kaisha
    • Reiji Niino
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...