Tomoyuki SHINOHARA

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 12,036,583
- Issue date Jul 16, 2024
- SCREEN Holdings Co., Ltd.
- Tomoyuki Shinohara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,036,662
- Issue date Jul 16, 2024
- SCREEN Holdings Co., Ltd.
- Tomoyuki Shinohara
- B08 - CLEANING
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 12,017,257
- Issue date Jun 25, 2024
- SCREEN Holdings Co., Ltd.
- Tomoyuki Shinohara
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20250001462
- Publication date Jan 2, 2025
- SCREEN Holdings Co., Ltd.
- Takuma TAKAHASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE
- Publication number 20240321598
- Publication date Sep 26, 2024
- SCREEN Holdings Co., Ltd.
- Takuma TAKAHASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING SYSTEM, SUBSTRATE PRO...
- Publication number 20230017418
- Publication date Jan 19, 2023
- SCREEN Holdings Co., Ltd.
- Nobuaki OKITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE ALIGNMENT DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRA...
- Publication number 20230010624
- Publication date Jan 12, 2023
- SCREEN Holdings Co., Ltd.
- Nobuaki OKITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20230001456
- Publication date Jan 5, 2023
- SCREEN Holdings Co., Ltd.
- Tomoyuki SHINOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20220410219
- Publication date Dec 29, 2022
- SCREEN Holdings Co., Ltd.
- Tomoyuki SHINOHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20220395866
- Publication date Dec 15, 2022
- SCREEN Holdings Co., Ltd.
- Kazuki Nakamura
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE
- Publication number 20220395867
- Publication date Dec 15, 2022
- SCREEN Holdings Co., Ltd.
- Tomoyuki SHINOHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220088793
- Publication date Mar 24, 2022
- SCREEN Holdings Co., Ltd.
- Tomoyuki SHINOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBST...
- Publication number 20220093420
- Publication date Mar 24, 2022
- SCREEN Holdings Co., Ltd.
- Tomoyuki SHINOHARA
- B08 - CLEANING

Tomoyuki SHINOHARA

Person

Patents Grantslast 30 patents

Substrate cleaning device and substrate cleaning method

Substrate processing apparatus and substrate processing method

Substrate cleaning device and substrate cleaning method

Patents Applicationslast 30 patents

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING DEVICE

SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING SYSTEM, SUBSTRATE PRO...

SUBSTRATE ALIGNMENT DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRA...

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBST...