Membership
Tour
Register
Log in
Tomoyuki Suwa
Follow
Person
Miyagi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of forming nitride film
Patent number
10,927,454
Issue date
Feb 23, 2021
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
Shinichi Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
10,559,460
Issue date
Feb 11, 2020
Tokyo Electron Limited
Akira Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface treatment method for atomically flattening a silicon wafer...
Patent number
9,157,681
Issue date
Oct 13, 2015
National University Corporation Tohoku University
Tadahiro Ohmi
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Semiconductor substrate and semiconductor device
Patent number
8,492,879
Issue date
Jul 23, 2013
National University Corporation Tohoku University
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SELECTIVE FILM FORMATION METHOD
Publication number
20230175115
Publication date
Jun 8, 2023
TOKYO ELECTRON LIMITED
Shuji AZUMO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING NITRIDE FILM
Publication number
20190390332
Publication date
Dec 26, 2019
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
Shinichi NISHIMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20190074177
Publication date
Mar 7, 2019
TOKYO ELECTRON LIMITED
Akira SHIMIZU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Surface Treatment Method for Atomically Flattening a Silicon Wafer...
Publication number
20160276171
Publication date
Sep 22, 2016
NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
Tadahiro OHMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20140252436
Publication date
Sep 11, 2014
TOHOKU UNIVERSITY
Tomoyuki Suwa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE TREATMENT METHOD FOR ATOMICALLY FLATTENING A SILICON WAFER...
Publication number
20120292743
Publication date
Nov 22, 2012
Tadahiro OHMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR SUBSTRATE AND SEMICONDUCTOR DEVICE
Publication number
20100213516
Publication date
Aug 26, 2010
National University Corporation Tohoku University
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS