Tomoyuki WATANABE

Person

  • Kudamatsu, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus and sample stage

    • Patent number 9,150,967
    • Issue date Oct 6, 2015
    • Hitachi High-Technologies Corporation
    • Tomoyuki Watanabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma etching method

    • Patent number 8,889,024
    • Issue date Nov 18, 2014
    • Hitachi High-Technologies Corporation
    • Tomoyuki Watanabe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching method

    • Patent number 8,741,166
    • Issue date Jun 3, 2014
    • Hitachi High-Technologies Corporation
    • Tomoyuki Watanabe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching method

    • Patent number 8,580,131
    • Issue date Nov 12, 2013
    • Hitachi High-Technologies Corporation
    • Tomoyuki Watanabe
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma Etching Method

    • Publication number 20140220785
    • Publication date Aug 7, 2014
    • Hitachi High-Technologies Corporation
    • Tomoyuki WATANABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD

    • Publication number 20130157470
    • Publication date Jun 20, 2013
    • Hitachi High-Technologies Corporation
    • Tomoyuki WATANABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD

    • Publication number 20130109184
    • Publication date May 2, 2013
    • Hitachi High-Technologies Corporation
    • Tomoyuki WATANABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND SAMPLE STAGE

    • Publication number 20110297082
    • Publication date Dec 8, 2011
    • Hitachi High-Technologies Corporation
    • Tomoyuki Watanabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...