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Tomoyuki WATANABE
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Kudamatsu, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing apparatus and sample stage
Patent number
9,150,967
Issue date
Oct 6, 2015
Hitachi High-Technologies Corporation
Tomoyuki Watanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma etching method
Patent number
8,889,024
Issue date
Nov 18, 2014
Hitachi High-Technologies Corporation
Tomoyuki Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method
Patent number
8,741,166
Issue date
Jun 3, 2014
Hitachi High-Technologies Corporation
Tomoyuki Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method
Patent number
8,580,131
Issue date
Nov 12, 2013
Hitachi High-Technologies Corporation
Tomoyuki Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Plasma Etching Method
Publication number
20140220785
Publication date
Aug 7, 2014
Hitachi High-Technologies Corporation
Tomoyuki WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD
Publication number
20130157470
Publication date
Jun 20, 2013
Hitachi High-Technologies Corporation
Tomoyuki WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD
Publication number
20130109184
Publication date
May 2, 2013
Hitachi High-Technologies Corporation
Tomoyuki WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND SAMPLE STAGE
Publication number
20110297082
Publication date
Dec 8, 2011
Hitachi High-Technologies Corporation
Tomoyuki Watanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...