Tomoyuki Yaguchi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer inspection method and wafer inspection apparatus
- Patent number 9,953,407
- Issue date Apr 24, 2018
- Disco Corporation
- Yusaku Ito
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER INSPECTION METHOD AND WAFER INSPECTION APPARATUS
- Publication number 20160098828
- Publication date Apr 7, 2016
- Disco Corporation
- Yusaku Ito
- G01 - MEASURING TESTING