Tomoyuki Yamada

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,289,351
- Issue date Mar 29, 2022
- Kokusai Electric Corporation
- Tomoyuki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,825,697
- Issue date Nov 3, 2020
- Kokusai Electric Corporation
- Tomoyuki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, exhaust system and method of manufa...
- Patent number 10,163,663
- Issue date Dec 25, 2018
- Kokusai Electric Corporation
- Toshihiko Yonejima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,698,037
- Issue date Jul 4, 2017
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,459,202
- Issue date Jun 11, 2013
- Hitachi Kokusai Electronics Inc.
- Tomoyuki Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 8,303,712
- Issue date Nov 6, 2012
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,112,183
- Issue date Feb 7, 2012
- Hitachi Kokusai Electric, Inc.
- Tomoyuki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing equipment
- Patent number D652395
- Issue date Jan 17, 2012
- Hitachi Kokusai Electric Inc.
- Masakazu Shimada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Semiconductor manufacturing equipment
- Patent number D651990
- Issue date Jan 10, 2012
- Hitachi Kokusai Electric Inc.
- Masakazu Shimada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus having gas side flow via gas inlet
- Patent number 7,700,054
- Issue date Apr 20, 2010
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
HEATER ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANU...
- Publication number 20240150897
- Publication date May 9, 2024
- Kokusai Electric Corporation
- Makoto KAWABATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20210313205
- Publication date Oct 7, 2021
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200303219
- Publication date Sep 24, 2020
- Kokusai Electric Corporation
- Tomoyuki YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200194291
- Publication date Jun 18, 2020
- Kokusai Electric Corporation
- Tomoyuki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, EXHAUST SYSTEM AND METHOD OF MANUFA...
- Publication number 20180144953
- Publication date May 24, 2018
- Hitachi Kokusai Electric Inc.
- Toshihiko YONEJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110305543
- Publication date Dec 15, 2011
- Hitachi Kokusai Electric Inc.
- Seiyo NAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100078128
- Publication date Apr 1, 2010
- Hitachi Kokusai Electric, Inc.
- Tomoyuki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20090197402
- Publication date Aug 6, 2009
- Hitachi Kokusai Electric, Inc.
- Seiyo NAKASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20090192652
- Publication date Jul 30, 2009
- Hitachi Kokusai Electric, Inc.
- Tomoyuki YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, method of manufacturing semiconduct...
- Publication number 20080153314
- Publication date Jun 26, 2008
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS

Tomoyuki Yamada

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, exhaust system and method of manufa...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus, method for manufacturing semiconduc...

Substrate processing apparatus and substrate processing method

Semiconductor manufacturing equipment

Semiconductor manufacturing equipment

Substrate processing apparatus having gas side flow via gas inlet

Patents Applicationslast 30 patents

HEATER ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANU...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, EXHAUST SYSTEM AND METHOD OF MANUFA...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate processing apparatus, method of manufacturing semiconduct...