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Tomoyuki Yamazaki
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Tokyo, JP
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last 30 patents
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Patent Grant
Vacuum pump self-diagnosis method, vacuum pump self-diagnosis syste...
Patent number
8,721,295
Issue date
May 13, 2014
Ebara Corporation
Tetsuro Sugiura
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Patents Applications
last 30 patents
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Patent Application
VACUUM PUMP SELF-DIAGNOSIS METHOD, VACUUM PUMP SELF-DIAGNOSIS SYSTE...
Publication number
20090035151
Publication date
Feb 5, 2009
EBARA CORPORATION
Tetsuro Sugiura
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...