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Tong Earn Tay
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Singapore, SG
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Patents Grants
last 30 patents
Information
Patent Grant
Method to improve adhesion of dielectric films in damascene interco...
Patent number
7,078,333
Issue date
Jul 18, 2006
Luona Goh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to improve adhesion of dielectric films in damascene interco...
Patent number
6,797,605
Issue date
Sep 28, 2004
Chartered Semiconductor Manufacturing Ltd.
Luona Goh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus to quantify the adhesion of film
Patent number
6,513,374
Issue date
Feb 4, 2003
Chartered Semiconductor Manufacturing Ltd.
Loh-Nah Luona Goh
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method to improve adhesion of dielectric films in damascene interco...
Publication number
20050032392
Publication date
Feb 10, 2005
Chartered Semiconductor Manufacturing Ltd.
Luona Goh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method to improve adhesion of dielectric films in damascene interco...
Publication number
20030022472
Publication date
Jan 30, 2003
Chartered Semiconductor Manufacturing Ltd.
Luona Goh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus to quantify the adhesion of film
Publication number
20020100334
Publication date
Aug 1, 2002
Loh-Nah Luona Goh
G01 - MEASURING TESTING