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Tong Fang
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Palo Alto, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Lower plasma-exclusion-zone rings for a bevel etcher
Patent number
10,832,923
Issue date
Nov 10, 2020
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Upper plasma-exclusion-zone rings for a bevel etcher
Patent number
10,811,282
Issue date
Oct 20, 2020
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control of bevel etch film profile using plasma exclusion zone ring...
Patent number
10,629,458
Issue date
Apr 21, 2020
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control of bevel etch film profile using plasma exclusion zone ring...
Patent number
8,398,778
Issue date
Mar 19, 2013
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for controlling bevel edge etching in a plasma chamber
Patent number
8,349,202
Issue date
Jan 8, 2013
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High pressure bevel etch process
Patent number
8,323,523
Issue date
Dec 4, 2012
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High pressure bevel etch process
Patent number
8,262,923
Issue date
Sep 11, 2012
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas modulation to control edge exclusion in a bevel edge etching pl...
Patent number
8,083,890
Issue date
Dec 27, 2011
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
LOWER PLASMA-EXCLUSION-ZONE RINGS FOR A BEVEL ETCHER
Publication number
20170301566
Publication date
Oct 19, 2017
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UPPER PLASMA-EXCLUSION-ZONE RINGS FOR A BEVEL ETCHER
Publication number
20170301565
Publication date
Oct 19, 2017
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COPPER DISCOLORATION PREVENTION FOLLOWING BEVEL ETCH PROCESS
Publication number
20140051255
Publication date
Feb 20, 2014
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF BEVEL ETCH FILM PROFILE USING PLASMA EXCLUSION ZONE RING...
Publication number
20130264015
Publication date
Oct 10, 2013
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for Controlling Bevel Edge Etching in a Plasma Chamber
Publication number
20120074099
Publication date
Mar 29, 2012
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH PRESSURE BEVEL ETCH PROCESS
Publication number
20110275219
Publication date
Nov 10, 2011
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS MODULATION TO CONTROL EDGE EXCLUSION IN A BEVEL EDGE ETCHING PL...
Publication number
20110253312
Publication date
Oct 20, 2011
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH PRESSURE BEVEL ETCH PROCESS
Publication number
20100151686
Publication date
Jun 17, 2010
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS MODULATION TO CONTROL EDGE EXCLUSION IN A BEVEL EDGE ETCHING PL...
Publication number
20090188627
Publication date
Jul 30, 2009
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Copper Discoloration Prevention Following Bevel Etch Process
Publication number
20090170334
Publication date
Jul 2, 2009
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Control of bevel etch film profile using plasma exclusion zone ring...
Publication number
20080227301
Publication date
Sep 18, 2008
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS