Tong YANG

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Lowell, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for correcting overlay errors in a lithographic p...
- Patent number 11,687,010
- Issue date Jun 27, 2023
- Onto Innovation Inc.
- Zhiyang Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR CORRECTING OVERLAY ERRORS IN A LITHOGRAPHIC P...
- Publication number 20210263427
- Publication date Aug 26, 2021
- Onto Innovation, Inc.
- Zhiyang LI
- H01 - BASIC ELECTRIC ELEMENTS