Tony J. Keeton

Person

Chandler, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 8,088,225
- Issue date Jan 3, 2012
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 7,648,579
- Issue date Jan 19, 2010
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder with peripheral lift ring
- Patent number 7,449,071
- Issue date Nov 11, 2008
- ASM America, Inc.
- Ravinder K. Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holder with stiffening rib
- Patent number 7,070,660
- Issue date Jul 4, 2006
- ASM America, Inc.
- Tony J. Keeton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gridded susceptor
- Patent number 7,033,445
- Issue date Apr 25, 2006
- ASM America, Inc.
- Tony J. Keeton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Localized heating of substrates using optics
- Patent number 6,879,777
- Issue date Apr 12, 2005
- ASM America, Inc.
- Matthew G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of loading a wafer onto a wafer holder to reduce thermal shock
- Patent number 6,861,321
- Issue date Mar 1, 2005
- ASM America, Inc.
- Tony J. Keeton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder with peripheral lift ring
- Patent number 6,776,849
- Issue date Aug 17, 2004
- ASM America, Inc.
- Ravinder K. Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHANE CONVERSION APPARATUS AND PROCESS USING A SUPERSONIC FLOW RE...
- Publication number 20140058169
- Publication date Feb 27, 2014
- UOP LLC
- Robert L. Bedard
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHANE CONVERSION APPARATUS AND PROCESS USING A SUPERSONIC FLOW RE...
- Publication number 20140058176
- Publication date Feb 27, 2014
- UOP LLC
- Robert L. Bedard
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSI...
- Publication number 20100089314
- Publication date Apr 15, 2010
- ASM AMERICA, INC
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate support system for reduced autodoping and backside deposi...
- Publication number 20050193952
- Publication date Sep 8, 2005
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Two-stage load for processing both sides of a wafer
- Publication number 20050176252
- Publication date Aug 11, 2005
- Matthew G. Goodman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low/high temperature substrate holder to reduce edge rolloff and ba...
- Publication number 20050092439
- Publication date May 5, 2005
- Tony J. Keeton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer holder with peripheral lift ring
- Publication number 20050011458
- Publication date Jan 20, 2005
- Ravinder K. Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Localized heating of substrates using optics
- Publication number 20040067052
- Publication date Apr 8, 2004
- Matthew G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer holder with stiffening rib
- Publication number 20030205324
- Publication date Nov 6, 2003
- Tony J. Keeton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of loading a wafer onto a wafer holder to reduce thermal shock
- Publication number 20030190823
- Publication date Oct 9, 2003
- Tony J. Keeton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer holder with peripheral lift ring
- Publication number 20030173031
- Publication date Sep 18, 2003
- Ravinder K. Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gridded susceptor
- Publication number 20030140850
- Publication date Jul 31, 2003
- Tony J. Keeton
- H01 - BASIC ELECTRIC ELEMENTS

Tony J. Keeton

Person

Patents Grantslast 30 patents

Substrate support system for reduced autodoping and backside deposi...

Substrate support system for reduced autodoping and backside deposi...

Wafer holder with peripheral lift ring

Wafer holder with stiffening rib

Gridded susceptor

Localized heating of substrates using optics

Method of loading a wafer onto a wafer holder to reduce thermal shock

Wafer holder with peripheral lift ring

Patents Applicationslast 30 patents

METHANE CONVERSION APPARATUS AND PROCESS USING A SUPERSONIC FLOW RE...

METHANE CONVERSION APPARATUS AND PROCESS USING A SUPERSONIC FLOW RE...

SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSI...

Substrate support system for reduced autodoping and backside deposi...

Two-stage load for processing both sides of a wafer

Low/high temperature substrate holder to reduce edge rolloff and ba...

Wafer holder with peripheral lift ring

Localized heating of substrates using optics

Wafer holder with stiffening rib

Method of loading a wafer onto a wafer holder to reduce thermal shock

Wafer holder with peripheral lift ring

Gridded susceptor