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Tony Jakubiec
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San Jose, CA, US
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last 30 patents
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Patent Grant
Wafer processing architecture including single-wafer load lock with...
Patent number
6,431,807
Issue date
Aug 13, 2002
Novellus Systems, Inc.
Craig Stevens
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer processing architecture including load locks
Patent number
6,375,746
Issue date
Apr 23, 2002
Novellus Systems, Inc.
Craig Stevens
H01 - BASIC ELECTRIC ELEMENTS