Tony Kaushal

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,227,837
- Issue date Feb 18, 2025
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer coating for corrosion resistance
- Patent number 12,191,120
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,163,219
- Issue date Dec 10, 2024
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 11,365,479
- Issue date Jun 21, 2022
- Lam Research Corporation
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 10,760,158
- Issue date Sep 1, 2020
- Lam Research Corporation
- Damodar Shanbhag
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic gas distribution plate with embedded electrode
- Patent number 10,217,614
- Issue date Feb 26, 2019
- Lam Research Corporation
- Jeremy Tucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTILAYER COATING FOR CORROSION RESISTANCE
- Publication number 20250069857
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
COATINGS WITH DIFFUSION BARRIERS FOR CORROSION AND CONTAMINATION PR...
- Publication number 20230317634
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Jordi Perez Mariano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER COATING FOR CORROSION RESISTANCE
- Publication number 20230290615
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Amir H. Tavakoli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20230002891
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL YTTRIUM OXIDE COATING
- Publication number 20220403531
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Tony S. Kaushal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20220275504
- Publication date Sep 1, 2022
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING...
- Publication number 20220028662
- Publication date Jan 27, 2022
- Paul KONKOLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20210292893
- Publication date Sep 23, 2021
- LAM RESEARCH CORPORATION
- Slobodan MITROVIC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20200347497
- Publication date Nov 5, 2020
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20190185999
- Publication date Jun 20, 2019
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC GAS DISTRIBUTION PLATE WITH EMBEDDED ELECTRODE
- Publication number 20160203952
- Publication date Jul 14, 2016
- LAM RESEARCH CORPORATION
- Jeremy Tucker
- H01 - BASIC ELECTRIC ELEMENTS

Tony Kaushal

Person

Patents Grantslast 30 patents

Ex situ coating of chamber components for semiconductor processing

Multilayer coating for corrosion resistance

Ex situ coating of chamber components for semiconductor processing

Ex situ coating of chamber components for semiconductor processing

Ex situ coating of chamber components for semiconductor processing

Ceramic gas distribution plate with embedded electrode

Patents Applicationslast 30 patents

MULTILAYER COATING FOR CORROSION RESISTANCE

COATINGS WITH DIFFUSION BARRIERS FOR CORROSION AND CONTAMINATION PR...

MULTILAYER COATING FOR CORROSION RESISTANCE

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

CONFORMAL YTTRIUM OXIDE COATING

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING...

SURFACE COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

CERAMIC GAS DISTRIBUTION PLATE WITH EMBEDDED ELECTRODE