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BIASED PULSE CMP GROOVE PATTERN
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Publication number 20200381258
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Publication date Dec 3, 2020
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Rohm and Haas Electronic Materials CMP Holdings, INC.
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John Vu Nguyen
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B24 - GRINDING POLISHING
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BIASED PULSE CMP GROOVE PATTERN
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Publication number 20180366333
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Publication date Dec 20, 2018
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Rohm and Haas Electronic Materials CMP Holdings, INC.
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John Vu Nguyen
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H01 - BASIC ELECTRIC ELEMENTS
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HIGH-RATE CMP POLISHING METHOD
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Publication number 20180361532
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Publication date Dec 20, 2018
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Rohm and Haas Electronic Materials CMP Holdings, INC.
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John Vu Nguyen
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H01 - BASIC ELECTRIC ELEMENTS
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TRAPEZOIDAL CMP GROOVE PATTERN
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Publication number 20180361533
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Publication date Dec 20, 2018
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Rohm and Haas Electronic Materials CMP Holdings, INC.
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John Vu Nguyen
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H01 - BASIC ELECTRIC ELEMENTS
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UNIFORM CMP POLISHING METHOD
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Publication number 20180366331
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Publication date Dec 20, 2018
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Rohm and Haas Electronic Materials CMP Holdings, INC.
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John Vu Nguyen
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H01 - BASIC ELECTRIC ELEMENTS
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