Tooru Abe

Person

Hiratsuka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Laser device and laser device control method
- Patent number 10,971,887
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Tooru Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generating apparatus
- Patent number 10,102,938
- Issue date Oct 16, 2018
- Gigaphoton Inc.
- Takayuki Yabu
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Excimer laser apparatus and excimer laser system
- Patent number 9,954,340
- Issue date Apr 24, 2018
- Gigaphoton Inc.
- Tooru Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus and excimer laser system
- Patent number 9,425,576
- Issue date Aug 23, 2016
- Gigaphoton Inc.
- Tooru Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus and excimer laser system
- Patent number 8,867,583
- Issue date Oct 21, 2014
- Gigaphoton Inc.
- Tooru Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 8,569,722
- Issue date Oct 29, 2013
- Gigaphoton Inc.
- Kouji Kakizaki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber apparatus, extreme ultraviolet light generation system, and...
- Patent number 8,525,140
- Issue date Sep 3, 2013
- Gigaphoton Inc.
- Tooru Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus, method for controlling...
- Patent number 8,502,178
- Issue date Aug 6, 2013
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for measuring and controlling target trajector...
- Patent number 8,324,600
- Issue date Dec 4, 2012
- Gigaphoton Inc.
- Hideyuki Hayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
LASER DEVICE AND LASER DEVICE CONTROL METHOD
- Publication number 20180351318
- Publication date Dec 6, 2018
- Gigaphoton Inc.
- Tooru ABE
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
- Publication number 20180240562
- Publication date Aug 23, 2018
- Gigaphoton Inc.
- Takayuki YABU
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM
- Publication number 20160322772
- Publication date Nov 3, 2016
- Gigaphoton Inc.
- Tooru ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM
- Publication number 20150003485
- Publication date Jan 1, 2015
- Gigaphoton Inc.
- Tooru ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20140034852
- Publication date Feb 6, 2014
- Gigaphoton Inc.
- Kouji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM
- Publication number 20130100980
- Publication date Apr 25, 2013
- Gigaphoton Inc.
- Tooru ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...
- Publication number 20130062539
- Publication date Mar 14, 2013
- GIGAPHOTON INC.
- Hideyuki HAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND...
- Publication number 20130026393
- Publication date Jan 31, 2013
- GIGAPHOTON INC.
- Tooru ABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, METHOD FOR CONTROLLING...
- Publication number 20120175533
- Publication date Jul 12, 2012
- GIGAPHOTON INC.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20110220816
- Publication date Sep 15, 2011
- Kouji Kakizaki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...
- Publication number 20100294958
- Publication date Nov 25, 2010
- Hideyuki HAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Person

Patents Grantslast 30 patents

Laser device and laser device control method

Extreme ultraviolet light generating apparatus

Excimer laser apparatus and excimer laser system

Excimer laser apparatus and excimer laser system

Excimer laser apparatus and excimer laser system

Extreme ultraviolet light generation apparatus

Chamber apparatus, extreme ultraviolet light generation system, and...

Extreme ultraviolet light source apparatus, method for controlling...

Apparatus and method for measuring and controlling target trajector...

Patents Applicationslast 30 patents

LASER DEVICE AND LASER DEVICE CONTROL METHOD

EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS

EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM

EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM

APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...

CHAMBER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND...

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, METHOD FOR CONTROLLING...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...