Tooru KAWASHIMA

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Shioya-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Detector that detects relative positions of marks while blocking no...
- Patent number 12,098,913
- Issue date Sep 24, 2024
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G01 - MEASURING TESTING
Information Patent Grant
Imprint apparatus
- Patent number 11,709,421
- Issue date Jul 25, 2023
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G02 - OPTICS
Information Patent Grant
Detection apparatus, imprint apparatus, and method of manufacturing...
- Patent number 9,927,701
- Issue date Mar 27, 2018
- Canon Kabushiki Kaisha
- Tooru Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20220236650
- Publication date Jul 28, 2022
- Canon Kabushiki Kaisha
- Ryo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTOR, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20210372776
- Publication date Dec 2, 2021
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200319547
- Publication date Oct 8, 2020
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20150146207
- Publication date May 28, 2015
- Canon Kabushiki Kaisha
- Tooru KAWASHIMA
- G01 - MEASURING TESTING