Tooru KITADA

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dual-target sputter deposition with controlled phase difference bet...
- Patent number 9,567,667
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 9,551,060
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS
- Publication number 20160071707
- Publication date Mar 10, 2016
- TOKYO ELECTRON LIMITED
- Shinji FURUKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20160032446
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Atsushi GOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL-TARGET SPUTTER DEPOSITION WITH CONTROLLED PHASE DIFFERENCE BET...
- Publication number 20150075971
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Shinji FURUKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...