Tooru NAKAMURA

Follow

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus having processing block including li...
- Patent number 11,139,181
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Hiroaki Inadomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,593,571
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Grant
Liquid treatment apparatus including return path and switching mech...
- Patent number 9,558,972
- Issue date Jan 31, 2017
- Tokyo Electron Limited
- Tooru Nakamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190103291
- Publication date Apr 4, 2019
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170287742
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160020122
- Publication date Jan 21, 2016
- TOKYO ELECTRON LIMITED
- Sho Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS
- Publication number 20140352741
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Tooru NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS