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Tooru Ueno
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Shunan-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum processing apparatus
Patent number
8,033,770
Issue date
Oct 11, 2011
Hitachi High-Technologies Corporation
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and vacuum processing method
Patent number
7,862,289
Issue date
Jan 4, 2011
Hitachi High-Technologies Corporation
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing method
Patent number
7,476,073
Issue date
Jan 13, 2009
Hitachi High-Technologies Corporation
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of operating vacuum processing equipment and methods of pro...
Patent number
6,920,369
Issue date
Jul 19, 2005
Hitachi, Ltd.
Tooru Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of operating vacuum processing equipment and methods of pro...
Patent number
6,795,745
Issue date
Sep 21, 2004
Hitachi, Ltd.
Tooru Ueno
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Vacuum Processing Apparatus And Vacuum Processing Method
Publication number
20110299962
Publication date
Dec 8, 2011
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20090010738
Publication date
Jan 8, 2009
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20090003978
Publication date
Jan 1, 2009
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20050220575
Publication date
Oct 6, 2005
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods of operating vacuum processing equipment and methods of pro...
Publication number
20050010320
Publication date
Jan 13, 2005
Tooru Ueno
H01 - BASIC ELECTRIC ELEMENTS