Torai IWASA

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Miyagi, JP

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Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240030003
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Torai IWASA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS
- Publication number 20230187183
- Publication date Jun 15, 2023
- TOKYO ELECTRON LIMITED
- Torai IWASA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING PROCESSING APPARATUS
- Publication number 20220319860
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Akira NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS