Torsten Feigl

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Thermally stable multilayer mirror for the EUV spectral range
- Patent number 7,986,455
- Issue date Jul 26, 2011
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Torsten Feigl
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Thermally stable multilayer mirror for the EUV spectral region
- Patent number 7,920,323
- Issue date Apr 5, 2011
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Nicolas Benoit
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Monochromator mirror for the EUV-spectral range
- Patent number 7,173,759
- Issue date Feb 6, 2007
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Torsten Feigl
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Thermally Stable Multilayer Mirror for the EUV Spectral Range
- Publication number 20090009858
- Publication date Jan 8, 2009
- Torsten Feigl
- G02 - OPTICS
Information Patent Application
Thermally Stable Multilayer Mirror for the Euv Spectral Region
- Publication number 20080088916
- Publication date Apr 17, 2008
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Nicolas Benoit
- G02 - OPTICS
Information Patent Application
Monochromator mirror for the euv-spectral range
- Publication number 20050128571
- Publication date Jun 16, 2005
- Torsten Feigl
- G02 - OPTICS