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Torsten Harzendorf
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Stadroda, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and sensor therefor
Patent number
8,629,418
Issue date
Jan 14, 2014
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor for use in a lithographic apparatus
Patent number
7,453,078
Issue date
Nov 18, 2008
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor for use in a lithographic apparatus
Patent number
7,282,701
Issue date
Oct 16, 2007
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Optical Arrangement for Spectral Decomposition of Light
Publication number
20180011334
Publication date
Jan 11, 2018
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Uwe Detlef Zeitner
G02 - OPTICS
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20080007844
Publication date
Jan 10, 2008
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20070108377
Publication date
May 17, 2007
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20060192093
Publication date
Aug 31, 2006
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY