Torsten R. Kaack

Person

Los Altos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology system, method, and computer program product employing au...
- Patent number 10,190,868
- Issue date Jan 29, 2019
- KLA-Tencor Corporation
- Liequan Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Spectral matching based calibration
- Patent number 10,088,413
- Issue date Oct 2, 2018
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Grant
Calculation method for local film stress measurements using local f...
- Patent number 9,625,823
- Issue date Apr 18, 2017
- KLA-Tencor Corporation
- Torsten R. Kaack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device models including re-usable sub-structures
- Patent number 9,553,033
- Issue date Jan 24, 2017
- KLA-Tencor Corporation
- Jonathan Iloreta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement of composition for thin films
- Patent number 9,442,063
- Issue date Sep 13, 2016
- KLA-Tencor Corporation
- Ming Di
- G01 - MEASURING TESTING
Information Patent Grant
Atmospheric molecular contamination control with local purging
- Patent number 9,110,020
- Issue date Aug 18, 2015
- KLA-Tencor Corporation
- Hidong Kwak
- B08 - CLEANING
Information Patent Grant
Multi-analyzer angle spectroscopic ellipsometry
- Patent number 9,046,474
- Issue date Jun 2, 2015
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Grant
Multi-analyzer angle spectroscopic ellipsometry
- Patent number 9,007,583
- Issue date Apr 14, 2015
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Grant
Atmospheric molecular contamination control with local purging
- Patent number 8,830,486
- Issue date Sep 9, 2014
- KLA-Tencor Corporation
- Hidong Kwak
- B08 - CLEANING
Information Patent Grant
High throughput thin film characterization and defect detection
- Patent number 8,711,349
- Issue date Apr 29, 2014
- KLA-Tencor Corporation
- Xiang Gao
- G01 - MEASURING TESTING
Information Patent Grant
Control by sample reflectivity
- Patent number 7,903,250
- Issue date Mar 8, 2011
- KLA-Tencor Corporation
- Fabio A. Faccini
- G01 - MEASURING TESTING
Information Patent Grant
Ellipsometry measurement and analysis
- Patent number 7,453,562
- Issue date Nov 18, 2008
- KLA-Tencor Corporation
- Torsten R. Kaack
- G01 - MEASURING TESTING
Information Patent Grant
Methods for measurement or analysis of a nitrogen concentration of...
- Patent number 7,349,079
- Issue date Mar 25, 2008
- KLA-Tencor Technologies Corp.
- Qiang Zhao
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...
- Publication number 20190041266
- Publication date Feb 7, 2019
- KLA-Tencor Corporation
- Tianhan Wang
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT EMPLOYING AU...
- Publication number 20160320315
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- Liequan Lee
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor Device Models Including Re-Usable Sub-Structures
- Publication number 20150199463
- Publication date Jul 16, 2015
- KLA-Tencor Corporation
- Jonathan Iloreta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Atmospheric Molecular Contamination Control with Local Purging
- Publication number 20150029494
- Publication date Jan 29, 2015
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Application
Spectral Matching Based Calibration
- Publication number 20130132021
- Publication date May 23, 2013
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Application
High Throughput Thin Film Characterization And Defect Detection
- Publication number 20130083320
- Publication date Apr 4, 2013
- KLA-Tencor Corporation
- Xiang Gao
- G01 - MEASURING TESTING
Information Patent Application
MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY
- Publication number 20130010296
- Publication date Jan 10, 2013
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Application
ATMOSPHERIC MOLECULAR CONTAMINATION CONTROL WITH LOCAL PURGING
- Publication number 20130010311
- Publication date Jan 10, 2013
- KLA-Tencor Corporation
- Hidong Kwak
- B08 - CLEANING
Information Patent Application
MEASUREMENT OF COMPOSITION FOR THIN FILMS
- Publication number 20130006539
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- Ming Di
- G01 - MEASURING TESTING
Information Patent Application
Methods for measurement or analysis of a nitrogen concentration of...
- Publication number 20050254049
- Publication date Nov 17, 2005
- Qiang Zhao
- G01 - MEASURING TESTING

Torsten R. Kaack

Person

Patents Grantslast 30 patents

Metrology system, method, and computer program product employing au...

Spectral matching based calibration

Calculation method for local film stress measurements using local f...

Semiconductor device models including re-usable sub-structures

Measurement of composition for thin films

Atmospheric molecular contamination control with local purging

Multi-analyzer angle spectroscopic ellipsometry

Multi-analyzer angle spectroscopic ellipsometry

Atmospheric molecular contamination control with local purging

High throughput thin film characterization and defect detection

Control by sample reflectivity

Ellipsometry measurement and analysis

Methods for measurement or analysis of a nitrogen concentration of...

Patents Applicationslast 30 patents

Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...

METROLOGY SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT EMPLOYING AU...

Semiconductor Device Models Including Re-Usable Sub-Structures

Atmospheric Molecular Contamination Control with Local Purging

Spectral Matching Based Calibration

High Throughput Thin Film Characterization And Defect Detection

MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY

ATMOSPHERIC MOLECULAR CONTAMINATION CONTROL WITH LOCAL PURGING

MEASUREMENT OF COMPOSITION FOR THIN FILMS

Methods for measurement or analysis of a nitrogen concentration of...