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Oyama-shi, JP
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last 30 patents
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Patent Grant
Extreme ultraviolet light generation apparatus, target control meth...
Patent number
11,287,744
Issue date
Mar 29, 2022
Gigaphoton Inc.
Toru Abe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation apparatus, target control meth...
Patent number
11,229,112
Issue date
Jan 18, 2022
Gigaphoton Inc.
Toru Abe
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, TARGET CONTROL METH...
Publication number
20210349400
Publication date
Nov 11, 2021
Gigaphoton Inc.
Toru Abe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, TARGET CONTROL METH...
Publication number
20210333716
Publication date
Oct 28, 2021
Gigaphoton Inc.
Toru ABE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY