Toru Asai

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Patents Grantslast 30 patents

Information Patent Grant
Single-side polishing method for substrate edge, and apparatus ther...
- Patent number 6,402,596
- Issue date Jun 11, 2002
- SpeedFam-IPEC Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer loading and unloading mechanism for loading robot
- Patent number 6,048,259
- Issue date Apr 11, 2000
- Speedfam Company, Limited
- Toru Asai
- B24 - GRINDING POLISHING