Toru Azuma

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thermal processing apparatus, thermal processing method, and substr...
- Patent number 7,522,823
- Issue date Apr 21, 2009
- Sokudo Co., Ltd.
- Yasuhiro Fukumoto
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
Thermal processing apparatus, thermal processing method, and substr...
- Publication number 20050058440
- Publication date Mar 17, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Fukumoto
- H01 - BASIC ELECTRIC ELEMENTS