Toru FUJII

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,862,436
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Toru Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,183,371
- Issue date Nov 23, 2021
- Tokyo Electron Limited
- Toru Fujii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220044914
- Publication date Feb 10, 2022
- TOKYO ELECTRON LIMITED
- Toru Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200211826
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Toru Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS, SLOT ANTENNA, AND SEMICONDUC...
- Publication number 20150013907
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Toru FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS, SLOT ANTENNA, AND SEMICONDUC...
- Publication number 20150013912
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Toru FUJII
- H01 - BASIC ELECTRIC ELEMENTS