Toru HIRATA

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,249,533
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Yoshinori Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,955,365
- Issue date Apr 9, 2024
- Tokyo Electron Limited
- Yoshinori Ikeda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240178046
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230311170
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Toru HIRATA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220037189
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210343576
- Publication date Nov 4, 2021
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- H01 - BASIC ELECTRIC ELEMENTS