Toru HISAMATSU

Person

  • Miyagi, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

    • Publication number 20240282578
    • Publication date Aug 22, 2024
    • TOKYO ELECTRON LIMITED
    • Toru HISAMATSU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PROCESSING SUBSTRATES

    • Publication number 20230035391
    • Publication date Feb 2, 2023
    • TOKYO ELECTRON LIMITED
    • Toru HISAMATSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR SUBSTRATE PROCESSING

    • Publication number 20230010069
    • Publication date Jan 12, 2023
    • TOKYO ELECTRON LIMITED
    • Masahiro Tabata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

    • Publication number 20220411928
    • Publication date Dec 29, 2022
    • TOKYO ELECTRO LIMITED
    • Michiko NAKAYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND PROCESSING SYSTEM

    • Publication number 20220122802
    • Publication date Apr 21, 2022
    • TOKYO ELECTRON LIMITED
    • Daisuke NISHIDE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PROCESSING WORKPIECE

    • Publication number 20220122840
    • Publication date Apr 21, 2022
    • TOKYO ELECTRON LIMITED
    • Yoshihide KIHARA
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

    • Publication number 20220115235
    • Publication date Apr 14, 2022
    • TOKYO ELECTRON LIMITED
    • Toru HISAMATSU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM ETCHING METHOD FOR ETCHING FILM

    • Publication number 20210384039
    • Publication date Dec 9, 2021
    • TOKYO ELECTRON LIMITED
    • Takayuki HOSHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR PROCESSING WORKPIECE

    • Publication number 20210327719
    • Publication date Oct 21, 2021
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

    • Publication number 20210320011
    • Publication date Oct 14, 2021
    • TOKYO ELECTRON LIMITED
    • Yoshihide KIHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR PROCESSING SUBSTRATES

    • Publication number 20210111034
    • Publication date Apr 15, 2021
    • TOKYO ELECTRON LIMITED
    • Toru HISAMATSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR SUBSTRATE PROCESSING

    • Publication number 20200381265
    • Publication date Dec 3, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro Tabata
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD FOR PROCESSING WORKPIECE

    • Publication number 20200303181
    • Publication date Sep 24, 2020
    • TOKYO ELECTRON LIMITED
    • Yoshihide KIHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR PROCESSING SUBSTRATES

    • Publication number 20200251344
    • Publication date Aug 6, 2020
    • TOKYO ELECTRON LIMITED
    • Toru HISAMATSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND PROCESSING SYSTEM

    • Publication number 20200243298
    • Publication date Jul 30, 2020
    • TOKYO ELECTRON LIMITED
    • Daisuke NISHIDE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM ETCHING METHOD FOR ETCHING FILM

    • Publication number 20200234970
    • Publication date Jul 23, 2020
    • TOKYO ELECTRON LIMITED
    • Takayuki HOSHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

    • Publication number 20200194274
    • Publication date Jun 18, 2020
    • TOKYO ELECTRON LIMITED
    • Yoshihide KIHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD

    • Publication number 20200194257
    • Publication date Jun 18, 2020
    • TOKYO ELECTRON LIMITED
    • Toru HISAMATSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD

    • Publication number 20200176265
    • Publication date Jun 4, 2020
    • TOKYO ELECTRON LIMITED
    • Takayuki KATSUNUMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF PROCESSING TARGET OBJECT

    • Publication number 20200144071
    • Publication date May 7, 2020
    • TOKYO ELECTRON LIMITED
    • Yoshihide Kihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WORKPIECE PROCESSING METHOD

    • Publication number 20200135480
    • Publication date Apr 30, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR PROCESSING TARGET OBJECT

    • Publication number 20200075343
    • Publication date Mar 5, 2020
    • TOKYO ELECTRON LIMITED
    • Yoshihide KIHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

    • Publication number 20200032395
    • Publication date Jan 30, 2020
    • TOKYO ELECTRON LIMITED
    • Michiko NAKAYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

    • Publication number 20190393031
    • Publication date Dec 26, 2019
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

    • Publication number 20190378730
    • Publication date Dec 12, 2019
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF PROCESSING TARGET OBJECT

    • Publication number 20190326125
    • Publication date Oct 24, 2019
    • TOKYO ELECTRON LIMITED
    • Yoshihide Kihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PROCESSING WORKPIECE

    • Publication number 20190259627
    • Publication date Aug 22, 2019
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF PROCESSING SUBSTRATE

    • Publication number 20190198350
    • Publication date Jun 27, 2019
    • TOKYO ELECTRON LIMITED
    • Masahiro Tabata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR PROCESSING WORKPIECE

    • Publication number 20190131141
    • Publication date May 2, 2019
    • TOKYO ELECTRON LIMITED
    • Yoshihide KIHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR PROCESSING WORKPIECE

    • Publication number 20190108997
    • Publication date Apr 11, 2019
    • TOKYO ELECTRON LIMITED
    • Yoshihide KIHARA
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY