Toru IHARA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,594,427
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Toru Ihara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,851,468
- Issue date Dec 1, 2020
- Tokyo Electron Limited
- Tadashi Iino
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230022814
- Publication date Jan 26, 2023
- TOKYO ELECTRON LIMITED
- Saya Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220130690
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Toru Ihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210159095
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Toru Ihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170283977
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Tadashi IINO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR