Toru Kakuda

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,087,598
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,948,778
- Issue date Apr 2, 2024
- Kokusai Electric Corporation
- Hidehiro Yanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing semiconductor device and recording medium
- Patent number 11,168,396
- Issue date Nov 9, 2021
- Kokusai Electric Corporation
- Toru Kakuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,101,111
- Issue date Aug 24, 2021
- Kokusai Electric Corporation
- Hidehiro Yanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 10,985,017
- Issue date Apr 20, 2021
- Kokusai Electric Corporation
- Katsuhiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,763,084
- Issue date Sep 1, 2020
- Kokusai Electric Corporation
- Hidehiro Yanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,911,580
- Issue date Mar 6, 2018
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 9,793,112
- Issue date Oct 17, 2017
- Hitachi Kokusai Electric Inc.
- Takuya Joda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20210343507
- Publication date Nov 4, 2021
- Kokusai Electric Corporation
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200381221
- Publication date Dec 3, 2020
- Kokusai Electric Corporation
- Hidehiro YANAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
- Publication number 20200002816
- Publication date Jan 2, 2020
- Kokusai Electric Corporation
- Toru KAKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-Transitory Com...
- Publication number 20190304778
- Publication date Oct 3, 2019
- Kokusai Electric Corporation
- Katsuhiko YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizer and Substrate Processing Apparatus
- Publication number 20190003047
- Publication date Jan 3, 2019
- Kokusai Electric Corporation
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180204742
- Publication date Jul 19, 2018
- Hitachi Kokusai Electric Inc.
- Hideto TATENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20180144908
- Publication date May 24, 2018
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...
- Publication number 20160203976
- Publication date Jul 14, 2016
- Hitachi Kokusai Electric Inc.
- Takuya JODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20120132228
- Publication date May 31, 2012
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20090176381
- Publication date Jul 9, 2009
- Hitachi Kokusai Electric Inc.
- Shin HIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Ashing system
- Publication number 20080096392
- Publication date Apr 24, 2008
- Hitachi Kokusai Electric Inc.
- Toru Kakuda
- H01 - BASIC ELECTRIC ELEMENTS

Toru Kakuda

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Method of manufacturing semiconductor device and recording medium

Substrate processing apparatus, method of manufacturing semiconduct...

Method of manufacturing semiconductor device and non-transitory com...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Method of manufacturing semiconductor device and non-transitory com...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM

Method of Manufacturing Semiconductor Device and Non-Transitory Com...

Vaporizer and Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

Ashing system