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Toru KANAZAWA
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Nirasaki City, Yamanashi, JP
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last 30 patents
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Patent Grant
Film-forming method and film-forming apparatus
Patent number
12,018,370
Issue date
Jun 25, 2024
Tokyo Electron Limited
Tatsuhiko Tanimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20240128081
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yoshihiro TAKEZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
Publication number
20220396874
Publication date
Dec 15, 2022
Tokyo Electron Limited
Tatsuhiko TANIMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...