Toru Kawaguchi

Follow

Person

Ageo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for measuring displacement of a stage
- Patent number 7,283,200
- Issue date Oct 16, 2007
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection device and exposure apparatus and exposu...
- Patent number 6,897,462
- Issue date May 24, 2005
- Nikon Corporation
- Toru Kawaguchi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
System and method for measuring displacement of a stage
- Publication number 20050012918
- Publication date Jan 20, 2005
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY