Toru Kimura

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Chigasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin film forming apparatus, film thickness measuring method and fi...
- Patent number 8,226,802
- Issue date Jul 24, 2012
- Ulvac, Inc.
- Masato Fukao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THIN FILM FORMING APPARATUS, FILM THICKNESS MEASURING METHOD AND FI...
- Publication number 20100187094
- Publication date Jul 29, 2010
- ULVAC, Inc.
- Masato FUKAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...