Toru Kitada

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film thickness measurement method, film thickness measurement devic...
- Patent number 12,018,928
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Kazunaga Ono
- G01 - MEASURING TESTING
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,894,222
- Issue date Feb 6, 2024
- Tokyo Electron Limited
- Atsushi Takeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition device and deposition method
- Patent number 10,309,005
- Issue date Jun 4, 2019
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum-processing apparatus, vacuum-processing method, and storage...
- Patent number 9,790,590
- Issue date Oct 17, 2017
- Tokyo Electron Limited
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus of magnetoresistance elements
- Patent number 7,731,825
- Issue date Jun 8, 2010
- Canon Anelva Corporation
- Toru Kitada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20240274436
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Shota ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...
- Publication number 20240021423
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND CONTROL METHOD
- Publication number 20230175114
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Shota ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230175112
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Shota ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM THICKNESS MEASUREMENT METHOD, FILM THICKNESS MEASUREMENT DEVIC...
- Publication number 20230011226
- Publication date Jan 12, 2023
- TOKYO ELECTRON LIMITED
- Kazunaga ONO
- G01 - MEASURING TESTING
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20230005989
- Publication date Jan 5, 2023
- TOKYO ELECTRON LIMITED
- Keisuke SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS, PROCESSING CONDITION DETERMINATION METHOD,...
- Publication number 20220415634
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Kenichi Imakita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220403503
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220098717
- Publication date Mar 31, 2022
- TOKYO ELECTRON LIMITED
- Kenichi IMAKITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210407779
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Atsushi TAKEUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming Perpendicular Magnetization Type Magnetic Tunnel...
- Publication number 20170317273
- Publication date Nov 2, 2017
- TOKYO ELECTRON LIMITED
- Toru KITADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION DEVICE AND DEPOSITION METHOD
- Publication number 20160251746
- Publication date Sep 1, 2016
- Tokyo Electron Limited
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum-Processing Apparatus, Vacuum-Processing Method, and Storage...
- Publication number 20150187546
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING APPARATUS
- Publication number 20150187549
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Toru Kitada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETRON SPUTTERING DEVICE, MAGNETRON SPUTTERING METHOD, AND NON-T...
- Publication number 20150136596
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Kanto Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF MAGNETORESISTAN...
- Publication number 20090139855
- Publication date Jun 4, 2009
- Canon ANELVA Corporation
- Toru Kitada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Manufacturing Method And Manufacturing Apparatus Of Magnetoresistan...
- Publication number 20060060466
- Publication date Mar 23, 2006
- ANELVA CORPORATION
- Toru Kitada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Toru Kitada

Person

Patents Grantslast 30 patents

Film thickness measurement method, film thickness measurement devic...

Film forming apparatus and film forming method

Deposition device and deposition method

Vacuum-processing apparatus, vacuum-processing method, and storage...

Manufacturing apparatus of magnetoresistance elements

Patents Applicationslast 30 patents

FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE

FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...

SPUTTERING APPARATUS AND CONTROL METHOD

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM THICKNESS MEASUREMENT METHOD, FILM THICKNESS MEASUREMENT DEVIC...

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM FORMING APPARATUS, PROCESSING CONDITION DETERMINATION METHOD,...

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

Method for Forming Perpendicular Magnetization Type Magnetic Tunnel...

DEPOSITION DEVICE AND DEPOSITION METHOD

Vacuum-Processing Apparatus, Vacuum-Processing Method, and Storage...

MAGNETRON SPUTTERING APPARATUS

MAGNETRON SPUTTERING DEVICE, MAGNETRON SPUTTERING METHOD, AND NON-T...

MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF MAGNETORESISTAN...

Manufacturing Method And Manufacturing Apparatus Of Magnetoresistan...