Toru Kiuchi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Stage apparatus, exposure apparatus and method for exposing substra...
- Patent number 6,864,955
- Issue date Mar 8, 2005
- Nikon Corporation
- Kenji Nishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus and method for producing circuit device utilizing t...
- Patent number 6,590,633
- Issue date Jul 8, 2003
- Nikon Corporation
- Kenji Nishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, exposure method using the same and method of ma...
- Patent number 6,414,743
- Issue date Jul 2, 2002
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask substrate, projection exposure apparatus equipped with the mas...
- Patent number 6,040,096
- Issue date Mar 21, 2000
- Nikon Corporation
- Yukio Kakizaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask substrate, projection exposure apparatus equipped with the mas...
- Patent number 5,894,056
- Issue date Apr 13, 1999
- Nikon Corporation
- Yukio Kakizaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for manufacturing disc medium
- Patent number 5,289,231
- Issue date Feb 22, 1994
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus, exposure method using the same, and method of m...
- Publication number 20040114121
- Publication date Jun 17, 2004
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus and method for exposing substra...
- Publication number 20030164934
- Publication date Sep 4, 2003
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for manufacturing exposure apparatus and method for manufact...
- Publication number 20020171815
- Publication date Nov 21, 2002
- NIKON CORPORATION
- Tomoyuki Matsuyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method using the same, and method of m...
- Publication number 20010043321
- Publication date Nov 22, 2001
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY