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Yokkaichi-shi, JP
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last 30 patents
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Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
10,170,284
Issue date
Jan 1, 2019
Tokyo Electron Limited
Kenta Yasuda
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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last 30 patents
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Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20170004956
Publication date
Jan 5, 2017
TOKYO ELECTRON LIMITED
Kenta YASUDA
H01 - BASIC ELECTRIC ELEMENTS