Toru Mikami

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement apparatus and measurement method
- Patent number 9,612,108
- Issue date Apr 4, 2017
- Kabushiki Kaisha Toshiba
- Toru Mikami
- G01 - MEASURING TESTING
Information Patent Grant
Structure inspection method, pattern formation method, process cond...
- Patent number 7,903,264
- Issue date Mar 8, 2011
- Kabushiki Kaisha Toshiba
- Kei Hayasaki
- G01 - MEASURING TESTING
Information Patent Grant
Method for monitoring film thickness, a system for monitoring film...
- Patent number 7,573,582
- Issue date Aug 11, 2009
- Kabushiki Kaisha Toshiba
- Toru Mikami
- G01 - MEASURING TESTING
Information Patent Grant
Structure inspection method, pattern formation method, process cond...
- Patent number 7,483,155
- Issue date Jan 27, 2009
- Kabushiki Kaisha Toshiba
- Kei Hayasaki
- G01 - MEASURING TESTING
Information Patent Grant
Method for monitoring film thickness, a system for monitoring film...
- Patent number 7,348,192
- Issue date Mar 25, 2008
- Kabushiki Kaisha Toshiba
- Toru Mikami
- G01 - MEASURING TESTING
Information Patent Grant
Dimension measurement method, method of manufacturing semiconductor...
- Patent number 7,289,232
- Issue date Oct 30, 2007
- Kabushiki Kaisha Toshiba
- Toru Mikami
- G01 - MEASURING TESTING
Information Patent Grant
Film thickness measuring method and step measuring method
- Patent number 6,825,938
- Issue date Nov 30, 2004
- Kabushiki Kaisha Toshiba
- Toru Mikami
- G01 - MEASURING TESTING
Information Patent Grant
Mark position detecting system and method for detecting mark position
- Patent number 6,563,594
- Issue date May 13, 2003
- Kabushiki Kaisha Toshiba
- Toru Mikami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS AND MEASUREMENT METHOD
- Publication number 20160139034
- Publication date May 19, 2016
- KABUSHIKI KAISHA TOSHIBA
- Toru MIKAMI
- G01 - MEASURING TESTING
Information Patent Application
FILM THICKNESS MONITORING METHOD, FILM THICKNESS MONITORING DEVICE,...
- Publication number 20140238605
- Publication date Aug 28, 2014
- KABUSHIKI KAISHA TOSHIBA
- Toru MIKAMI
- G01 - MEASURING TESTING
Information Patent Application
FILM THICKNESS MONITORING METHOD, FILM THICKNESS MONITORING DEVICE,...
- Publication number 20140224425
- Publication date Aug 14, 2014
- KABUSHIKI KAISHA TOSHIBA
- Toru MIKAMI
- G01 - MEASURING TESTING
Information Patent Application
STRUCTURE INSPECTION METHOD, PATTERN FORMATION METHOD, PROCESS COND...
- Publication number 20090002722
- Publication date Jan 1, 2009
- Kabushiki Kaisha Toshiba
- KEI HAYASAKI
- G01 - MEASURING TESTING
Information Patent Application
Method for monitoring film thickness, a system for monitoring film...
- Publication number 20080151271
- Publication date Jun 26, 2008
- Kabushiki Kaisha Toshiba
- Toru Mikami
- G01 - MEASURING TESTING
Information Patent Application
Structure inspection method, pattern formation method, process cond...
- Publication number 20050168758
- Publication date Aug 4, 2005
- Kei Hayasaki
- G01 - MEASURING TESTING
Information Patent Application
Dimension measurement method, method of manufacturing semiconductor...
- Publication number 20050151980
- Publication date Jul 14, 2005
- Toru Mikami
- G01 - MEASURING TESTING
Information Patent Application
Method for monitoring film thickness, a system for monitoring film...
- Publication number 20050095730
- Publication date May 5, 2005
- Toru Mikami
- G01 - MEASURING TESTING
Information Patent Application
Film thickness measuring method and step measuring method
- Publication number 20020163652
- Publication date Nov 7, 2002
- Toru Mikami
- G01 - MEASURING TESTING
Information Patent Application
Mark position detecting system and method for detecting mark position
- Publication number 20010026368
- Publication date Oct 4, 2001
- Kabushiki Kaisha Toshiba
- Toru Mikami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Toru Mikami

Person

Patents Grantslast 30 patents

Measurement apparatus and measurement method

Structure inspection method, pattern formation method, process cond...

Method for monitoring film thickness, a system for monitoring film...

Structure inspection method, pattern formation method, process cond...

Method for monitoring film thickness, a system for monitoring film...

Dimension measurement method, method of manufacturing semiconductor...

Film thickness measuring method and step measuring method

Mark position detecting system and method for detecting mark position

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS AND MEASUREMENT METHOD

FILM THICKNESS MONITORING METHOD, FILM THICKNESS MONITORING DEVICE,...

FILM THICKNESS MONITORING METHOD, FILM THICKNESS MONITORING DEVICE,...

STRUCTURE INSPECTION METHOD, PATTERN FORMATION METHOD, PROCESS COND...

Method for monitoring film thickness, a system for monitoring film...

Structure inspection method, pattern formation method, process cond...

Dimension measurement method, method of manufacturing semiconductor...

Method for monitoring film thickness, a system for monitoring film...

Film thickness measuring method and step measuring method

Mark position detecting system and method for detecting mark position