Toru Morimoto

Follow

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for controlling substrate processing apparatus
- Patent number 5,898,588
- Issue date Apr 27, 1999
- Dainippon Screen Mfg. Co.
- Toru Morimoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and method
- Patent number 5,687,085
- Issue date Nov 11, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Toru Morimoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and method
- Patent number 5,668,733
- Issue date Sep 16, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Toru Morimoto
- H01 - BASIC ELECTRIC ELEMENTS