Toru Murakami

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Niihama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for operating a variable aperture in an ion impla...
- Patent number 6,194,734
- Issue date Feb 27, 2001
- Axcelis Technologies, Inc.
- Paul A. Loomis
- H01 - BASIC ELECTRIC ELEMENTS