Toru ONISHI

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Patents Grantslast 30 patents

Information Patent Grant
TiN film forming method and storage medium
- Patent number 9,133,548
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TiN FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20140206189
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...