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Kawasaki, JP
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last 30 patents
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Patent Grant
Electron-beam exposure system for reduced distortion of electron be...
Patent number
5,631,113
Issue date
May 20, 1997
Fujitsu Limited
Takamasa Satoh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron-beam exposure system for reduced distortion of electron be...
Patent number
5,444,257
Issue date
Aug 22, 1995
Fujitsu Limited
Takamasa Satoh
H01 - BASIC ELECTRIC ELEMENTS