Toru Otsuka

Person

Fukushima, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor deposition apparatus and vapor deposition method
- Patent number 7,591,908
- Issue date Sep 22, 2009
- Shin-Etsu Handotai Co., Ltd.
- Koichi Kanaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing silicon epitaxial wafer
- Patent number 7,479,187
- Issue date Jan 20, 2009
- Shin-Etsu Handotai Co., Ltd.
- Toru Otsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating silicon thin film
- Patent number 6,309,458
- Issue date Oct 30, 2001
- Shin-Etsu Handotai Co., Ltd.
- Hitoshi Habuka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for fabrication of thin film
- Patent number 6,245,647
- Issue date Jun 12, 2001
- Shin-Etsu Handotai Co., Ltd.
- Shoji Akiyama
- C30 - CRYSTAL GROWTH
Information Patent Grant
Process for cleaning silicon semiconductor substrates
- Patent number 6,235,645
- Issue date May 22, 2001
- Shin-Etsu Handotai Co., Ltd.
- Hitoshi Habuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating furnace and manufacturing method therefor
- Patent number 6,194,691
- Issue date Feb 27, 2001
- Shin-Etsu Handotai Co., Ltd.
- Hitoshi Habuka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for treating a surface of a silicon single crystal and a met...
- Patent number 6,124,209
- Issue date Sep 26, 2000
- Shin-Etsu Handotai Co., Ltd.
- Hitoshi Habuka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for smoothing surface of silicon single crystal substrate
- Patent number 6,008,128
- Issue date Dec 28, 1999
- Shin-Etsu Handotai Co., Ltd.
- Hitoshi Habuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon semiconductor crystal and a method for manufacturing it
- Patent number 5,885,346
- Issue date Mar 23, 1999
- Shin-Etsu Handotai Co., Ltd.
- Hitoshi Habuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Quartz Jig and Semiconductor Manufacturing Apparatus
- Publication number 20080092821
- Publication date Apr 24, 2008
- Shin-Etsu Handotai Co., Ltd.
- Toru Otsuka
- C30 - CRYSTAL GROWTH
Information Patent Application
Vapor deposition apparatus and vapor deposition method
- Publication number 20060180076
- Publication date Aug 17, 2006
- Shin-Etsu Handotal Co., Ltd.
- Koichi Kanaya
- C30 - CRYSTAL GROWTH
Information Patent Application
Susceptor and vapor growth device
- Publication number 20060180086
- Publication date Aug 17, 2006
- Shin-Etsu Handotai Co., Ltd.
- Koichi Kanaya
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for manufacturing silicon epitaxial wafer
- Publication number 20050160971
- Publication date Jul 28, 2005
- Toru Otsuka
- C30 - CRYSTAL GROWTH

Toru Otsuka

Person

Patents Grantslast 30 patents

Vapor deposition apparatus and vapor deposition method

Method for manufacturing silicon epitaxial wafer

Method for fabricating silicon thin film

Method for fabrication of thin film

Process for cleaning silicon semiconductor substrates

Heating furnace and manufacturing method therefor

Method for treating a surface of a silicon single crystal and a met...

Method for smoothing surface of silicon single crystal substrate

Silicon semiconductor crystal and a method for manufacturing it

Patents Applicationslast 30 patents

Quartz Jig and Semiconductor Manufacturing Apparatus

Vapor deposition apparatus and vapor deposition method

Susceptor and vapor growth device

Method for manufacturing silicon epitaxial wafer